SJ80C
SJ120C
SJ80C-18D
SJ80C-24D
SJ120C
SJ80C/SJ120C
by Nachi
Large-sized glass substrate transfer robot
- Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates.
Fastest motion in its class
- Rotation speed: Maximum 180°/sec
- Up and down speed: Maximum 1,050 mm/sec
Unique linkage structure applied to up and down axis
- High-rigidity structure for minimizing flexure and vibration
- Belt-less structure ensures high reliability and safety
Moving cables are completely enclosed in the arm
- The enclosed design prevents particle generation and looks good too
Application
- Glass substrate transferring
Specification
| Robot model | SJ80C-18D-01 | SJ80C-24D-01 | ||
|---|---|---|---|---|
| Air Cleanliness Class | 10 (0.3µm)*1 | |||
| Number of axes | 4 | |||
| Drive System | AC Servo Drive | |||
| Maximum Stroke | X1 | Back & Forth 1 |
3,670mm | |
| X2 | Back & Forth 2 |
3,670mm | ||
| θ | Rotation | +2.53 to -3.40rad (+145° to -195°) |
||
| Z | Up & Down |
1,800mm | 2,400mm | |
| Maximum Velocity | X1 | Back & Forth 1 |
3,000mm/sec | |
| X2 | Back & Forth 2 |
3,000mm/sec | ||
| θ | Rotation | 3.14rad/sec (180°/sec) | ||
| Z | Up & Down |
1,100mm/sec | 1,450mm/sec | |
| Payload Weight | 80kg per arm (total 135kg) | |||
| Repeatability | +/-0.3mm | |||
| Ambient Temperature | 0 to 35°C | |||
| Installation Conditions | Floor Mount | |||
| Robot Body Weight | 1,175kg | 1,200kg | ||
*1 At flange surface on robot tip.
1rad=57.3° 1N=0.102kgf
| Robot model | SJ120C-28D-01 | SJ120C-28S-01 | ||
|---|---|---|---|---|
| Structure | Articulated model (vertical linkage type robot) |
|||
| Air Cleanliness Class | 10 (0.3µm) *2 | |||
| Number of axes | 4 | 3 | ||
| Drive System | AC Servo Drive | |||
| Maximum Stroke | X1 | Back & Forth 1 |
4,480mm(+2,250 to -2,230mm) | |
| X2 | Back & Forth 2 |
4,480mm (+2,250 to -2,230mm) |
- | |
| θ | Rotation | +3.40 to -2.53rad (+195° to -145°) |
||
| Z | Up & Down |
2,800mm | ||
| Maximum Velocity | X1 | Back & Forth 1 |
3,600mm/sec | |
| X2 | Back & Forth 2 |
3,600mm/sec | - | |
| θ | Rotation | 3.14rad/sec (180°/sec) | ||
| Z | Up & Down |
1,050mm/sec | ||
| Payload Weight | X1 | Back & Forth 1 |
Max. 90kg | Max. 120kg |
| X2 | Back & Forth 2 |
Max. 120kg | - | |
| Allowable moment | X1 | Back & Forth 1 |
720N·m | 780N·m |
| X2 | Back & Forth 2 |
780N·m | - | |
| Allowable moment of intertia |
X1 | Back & Forth 1 |
135kg·m2 | 165kg·m2 |
| X2 | Back & Forth 2 |
165kg·m2 | - | |
| Repeatability | +/-0.3mm | +/-0.3mm | ||
| Ambient Temperature | 0 to 35°C | |||
| Installation Conditions | Floor Mount | |||
| Robot Body Weight | 1,880kg | 1,680kg | ||
*2 At flange surface on robot tip.
1rad=57.3° 1N=0.102kgf